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RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System

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SHANGHAI ROYAL TECHNOLOGY INC.

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RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System

Name: RTSP1213PECVD Thin Film Coating Machine Ion Source Plasma Enhanced PVD Deposition System
Brand: ROYAL
Price: 1 USD

China RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System wholesale

Brand Name : ROYAL

Model Number : RTSP1200

Certification : TUV CE

Place of Origin : Made in China

MOQ : 1 set

Price : negotiable

Payment Terms : L/C, D/A, D/P, T/T

Supply Ability : 6 sets per month

Delivery Time : 16 weeks

Packaging Details : Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.

Deposition Sources : DC / MF Sputtering Cathodes, Anode Linear Ion Source

Technique : PECVD, Balanced/Unbalanced Magentron Sputtering Cathode

Applications : Automotive, semiconductor, SiC Coating, DLC film deposition,

Film Features : wear resistance, strong adhesion, decorative coating colors

Factory Location : Shanghai city, China

Worldwide Service : Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America

Training Service : Machine operation, maintenance, coating process Recipes, program

Warranty : Limited warranty 1 year for free, whole life for machine

OEM & ODM : available, we support tailor made design and fabrication

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PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System

Why us?

Advanced production machineries (milling, welding,cutting,vacuum leak testing)combined with standardized production procedures and strict tests enable Royal Technology to produce high quality, reliable and low cost coating systems.
Quality, service and on-time delivery are the core principles of Royal technology’s business. A strategy of openly outsourcing simple components to professional manufactures allows us to focus attention to key parts and components R&D, manufacturing.
Strict quality control policies and rigorous selection of qualified suppliers assure Royal Technology’s customers receive the most advanced, high-end quality equipment at the most affordable cost.

The core technology is how to generate the electrical energy with fuel cell power module through electrochemical reaction between hydrogen as fuel and oxygen.

Hydrogen fuel cell as the most key important part of the power module, scientists, engineers, professors from transportation organizations and worldwide vehicles manufactures have made thousands tests and finally found the proper processing.

It is 100% envrionmetally friendly technology and vechiles.

Our machine RTSP1200 model is exclusively designed and developed for this appliation. We cooperated with Shanghai Jiaotong Unversity and SAIC Motor Corporation Limited Company.

Hydrogen Fuel Cell Power Module Sputtering System with the PECVD (Plasma Enhanced Chemical Vapor Deposition) Technology to deposit high uniformity, strong adhesion SiC thin films.

The Hydrogen fuel cell sputtering machine contains ion source, balanced/unblanced sputtering cathodes; with stable and large volume vacuum pumping system.

Hydrogen Fuel Cell Power Module Sputtering System Specifications

MODEL	RTSP1200
MATERIAL	Stainless Steel (S304)
CHAMBER SIZE	Φ1200*1300mm (H)
CHAMBER TYPE	Front and back 2-doors structure, Vertical
SINGLE PUMP PACKAGE	Rotary Piston Vacuum Pump
	Roots Vacuum Pump
	Magnetic Suspension Molecular Pump
	Rotary Vane Pump (Holding Pump)
TECHNOLOGY	Magnetron Sputtering, Ion Source PECVD
POWER SUPPLY	Sputtering power supply + Bias Power supply + Ion Source
DEPOSITION SOURCE	2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source
CONTROL	PLC+Touch Screen
GAS	Gas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen
SAFETY SYSTEM	Numerous safety interlocks to protect operators and equipment
COOLING	Cooling Water
CLEANING	Glow Discharge/Ion Source
POWER MAX.	150KW
AVERAGE POWER CONSUMPTION	75KW

The special designed rack and jig system can take out-move in completely for a substrates convenient loading/unloading.

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Product Tags:

magnetron sputtering machine

magnetron sputtering equipment

RTSP1213-PECVD Thin Film Coating Machine, Ion Source Plasma Enhanced PVD Deposition System Images

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